Filed: 1/7/2010 Granted: 11/8/2013 1401 days
結晶性乳酸系ポリエステルフィルムからペレットの製造方法およびその製造方法により得られるペレット
JP2010001370
Google Patents
Filed: 1/7/2010 Granted: 6/28/2013 1268 days
Filed: 1/7/2010 Granted: 4/18/2014 1562 days
Filed: 1/7/2010 Granted: 1/27/2012 750 days
Filed: 1/7/2010 Granted: 7/12/2013 1282 days
Filed: 1/7/2010 Granted: 12/21/2012 1079 days
Filed: 1/7/2010 Granted: 12/14/2012 1072 days
Filed: 1/7/2010 Granted: 11/2/2012 1030 days
Filed: 1/7/2010 Granted: 7/19/2013 1289 days
Filed: 1/7/2010 Granted: 2/15/2013 1135 days
Filed: 1/7/2010 Granted: 4/13/2012 827 days
Filed: 1/7/2010 Granted: 8/17/2012 953 days
Filed: 1/7/2010 Granted: 1/13/2012 736 days
Filed: 1/14/2010 Granted: 6/29/2012 897 days
Filed: 1/14/2010 Granted: 1/13/2012 729 days
Filed: 1/14/2010 Granted: 11/15/2013 1401 days
Filed: 1/14/2010 Granted: 3/23/2012 799 days
Filed: 1/14/2010 Granted: 1/20/2012 736 days
Filed: 1/14/2010 Granted: 11/1/2013 1387 days
Filed: 1/14/2010 Granted: 9/22/2011 616 days
Filed: 1/14/2010 Granted: 7/4/2014 1632 days
Filed: 1/14/2010 Granted: 5/11/2012 848 days
Filed: 1/14/2010 Granted: 3/23/2012 799 days
Filed: 1/14/2010 Granted: 11/16/2012 1037 days
Filed: 1/14/2010 Granted: 3/7/2014 1513 days
Filed: 1/14/2010 Granted: 10/19/2012 1009 days
Filed: 1/14/2010 Granted: 7/17/2015 2010 days
Filed: 1/14/2010 Granted: 9/13/2013 1338 days
Filed: 1/14/2010 Granted: 6/28/2013 1261 days
Filed: 1/14/2010 Granted: 8/15/2014 1674 days
Filed: 1/14/2010 Granted: 1/11/2013 1093 days
Filed: 1/14/2010 Granted: 5/11/2012 848 days
リソグラフィ装置内の不均一なレチクル加熱の補正方法、リソグラフィ装置、及びコンピュータ読み取り式記憶媒体。
JP2010010687
Google Patents
Filed: 1/14/2010 Granted: 9/9/2011 603 days
Filed: 1/14/2010 Granted: 7/6/2012 904 days
Filed: 1/14/2010 Granted: 9/20/2013 1345 days
Filed: 1/21/2010 Granted: 8/30/2013 1317 days
Filed: 1/21/2010 Granted: 9/19/2014 1702 days
Filed: 1/21/2010 Granted: 10/5/2012 988 days
Filed: 1/21/2010 Granted: 3/23/2012 792 days
Filed: 1/21/2010 Granted: 5/2/2013 1197 days
Filed: 1/21/2010 Granted: 12/2/2011 680 days
Filed: 1/21/2010 Granted: 8/5/2011 561 days
光学エレメント、このような光学エレメントを備えたリソグラフィ装置、デバイス製造方法およびそれによって製造されたデバイス
JP2010016371
Google Patents
Filed: 1/21/2010 Granted: 3/16/2012 785 days
Filed: 1/21/2010 Granted: 3/16/2012 785 days
Filed: 1/21/2010 Granted: 11/19/2010 302 days
Filed: 1/21/2010 Granted: 7/8/2011 533 days
Filed: 1/21/2010 Granted: 4/28/2011 462 days
Filed: 1/28/2010 Granted: 2/13/2015 1842 days
Filed: 1/28/2010 Granted: 2/13/2015 1842 days
Filed: 1/28/2010 Granted: 3/8/2013 1135 days